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1

SPIE Proceedings [SPIE 27th European Mask and Lithography Conference - Dresden, Germany (Tuesday 18 January 2011)] 27th European Mask and Lithography Conference - Thermal nanoimprint (T-NIL) with photoresists for hybrid lithography

Dhima, Khalid, Steinberg, Christian, Möllenbeck, Saskia, Mayer, Andre, Scheer, Hella-Christin, Behringer, Uwe F.W.

Year:

2011

Language:

english

File:

PDF, 487 KB

english, 2011

2

SPIE Proceedings [SPIE European Mask and Lithography Conf 2007 - Grenoble, France (Monday 22 January 2007)] 23rd European Mask and Lithography Conference - Challenges of residual layer minimisation in thermal nanoimprint lithography

Bogdanski, Nicolas, Wissen, Matthias, Möllenbeck, Saskia, Scheer, Hella-Christin, Behringer, Uwe F. W.

Year:

2007

Language:

english

File:

PDF, 184 KB

english, 2007

3

Structure size dependent recovery of thin polystyrene layers in thermal imprint lithography

Nicolas Bogdanski, Matthias Wissen, Saskia Möllenbeck, Hella-Christin Scheer

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 566 KB

english, 2007

4

Polymers below the critical molecular weight for thermal imprint lithography

Nicolas Bogdanski, Matthias Wissen, Saskia Möllenbeck, Hella-Christin Scheer

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 1.01 MB

english, 2008

5

Pattern definition through guided self-assembly in thermal nanoimprint

Andre Mayer, Nicolas Bogdanski, Saskia Möllenbeck, Hella-Christin Scheer

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 253 KB

english, 2010

6

Mechanistic study of lift-off for continuous metal layers after T-NIL

Andre Mayer, Saskia Möllenbeck, Khalid Dhima, Si Wang, Hella-Christin Scheer

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 445 KB

english, 2011

7

Reversed order hybrid lithography of T-NIL and UVL

Khalid Dhima, Christian Steinberg, Andre Mayer, Si Wang, Saskia Möllenbeck, Hella-Christin Scheer

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 874 KB

english, 2012

8

Preparation of random stamps for thermal nanoimprint

Wang, Si, Mayer, Andre, Dhima, Khalid, Möllenbeck, Saskia, Scheer, Hella-Christin

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 804 KB

english, 2012

9

A novel processing procedure for T/UV-NIL with negative tone resists

Dhima, Khalid, Mayer, Andre, Wang, Si, Möllenbeck, Saskia, Scheer, Hella-Christin

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.32 MB

english, 2013

10

Control of self-assembly defects in thermal nanoimprint

Mayer, Andre, Papenheim, Marc, Möllenbeck, Saskia, Dhima, Khalid, Wang, Si, Scheer, Hella-Christin

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 970 KB

english, 2013

11

Ancient Near Eastern Studies 50 2013

Möllenbeck, Christin

Journal:

Orientalistische Literaturzeitung

Year:

2014

Language:

german

File:

PDF, 98 KB

german, 2014

12

SPIE Proceedings [SPIE 28th European Mask and Lithography Conference (EMLC 2012) - Dresden, Germany (Tuesday 17 January 2012)] 28th European Mask and Lithography Conference - A novel tool for frequency assisted thermal nanoimprint (T-NIL)

Mayer, Andre, Dhima, Khalid, Möllenbeck, Saskia, Wang, Si, Scheer, Hella-Christin, Behringer, Uwe F.W., Maurer, Wilhelm

Year:

2012

Language:

english

File:

PDF, 1.61 MB

english, 2012

13

SPIE Proceedings [SPIE 26th European Mask and Lithography Conference - Grenoble, France (Monday 18 January 2010)] 26th European Mask and Lithography Conference - Positive or negative tone resist for a T-NIL/UVL hybrid process

Möllenbeck, Saskia, Behringer, Uwe F.W., Maurer, Wilhelm, Bogdanski, Niocolas, Mayer, Andre, Scheer, Hella-Christin

Year:

2010

Language:

english

File:

PDF, 14.70 MB

english, 2010

14

Zeitschrift für Assyriologie und Vorderasiatische Archäologie 104 2014

Möllenbeck, Christin

Journal:

Orientalistische Literaturzeitung

Year:

2016

Language:

german

File:

PDF, 1.53 MB

german, 2016

15

Seri, Andrea: The House of Prisoners. Slavery and State in Uruk during the Revolt against Samsu-iluna. 2013.

Möllenbeck, Christin

Journal:

Orientalistische Literaturzeitung

Year:

2017

Language:

german

File:

PDF, 212 KB

german, 2017

16

Altorientalische Forschungen 42 2015

Möllenbeck, Christin

Journal:

Orientalistische Literaturzeitung

Year:

2018

Language:

german

File:

PDF, 1.44 MB

german, 2018

17

Altorientalische Forschungen 41 2014

Möllenbeck, Christin

Journal:

Orientalistische Literaturzeitung

Year:

2019

Language:

german

File:

PDF, 82 KB

german, 2019

18

Altorientalische Forschungen 41 2014

Möllenbeck, Christin

Journal:

Orientalistische Literaturzeitung

Year:

2019

File:

PDF, 82 KB

2019